Invention Grant
US08687203B2 Method and apparatus for determining a shape of an optical test surface
有权
用于确定光学测试表面的形状的方法和装置
- Patent Title: Method and apparatus for determining a shape of an optical test surface
- Patent Title (中): 用于确定光学测试表面的形状的方法和装置
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Application No.: US13399716Application Date: 2012-02-17
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Publication No.: US08687203B2Publication Date: 2014-04-01
- Inventor: Bernd Doerband
- Applicant: Bernd Doerband
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Sughrue Mion, PLLC
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
A method of determining a shape of an optical test surface (14) includes: with adaptation optics (20), adapting a wavefront of a measuring beam (30) to a desired shape of the optical test surface (14), interferometrically measuring the shape of the optical test surface (14) with the adapted measuring beam, irradiating the adapted measuring beam at different angles of incidence onto the optical test surface and respectively measuring the wavefront of the measuring beam after the interaction of the measuring beam with the optical test surface (14), establishing the effect of the adaptation optics (20) upon the interferometric measurement result from the wavefronts measured for the individual angles of incidence, and determining the shape of the optical test surface (14) by removing the established effect of the adaptation optics (20) from the interferometric measurement result.
Public/Granted literature
- US20120236316A1 METHOD AND APPARATUS FOR DETERMINING A SHAPE OF AN OPTICAL TEST SURFACE Public/Granted day:2012-09-20
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