Invention Grant
- Patent Title: Asymmetric complementary dipole illuminator
- Patent Title (中): 非对称互补偶极子照明器
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Application No.: US13414954Application Date: 2012-03-08
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Publication No.: US08687170B2Publication Date: 2014-04-01
- Inventor: Azalia A. Krasnoperova
- Applicant: Azalia A. Krasnoperova
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Katherine Brown
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/42 ; G03B27/72

Abstract:
An apparatus, a method of designing the apparatus, a tool using the apparatus and a method of using the apparatus for optimizing optical photolithography during formation of integrated circuits. The apparatus includes: an asymmetrical complementary dipole element including: first and second openings being equidistant and mirror images about a first axis, the first and second openings having essentially a same first area and a same first optical density relative to a selected wavelength of light; third and fourth openings being equidistant and mirror images about a second axis, the third and fourth openings having essentially a same second area, and a same second optical density relative to the selected wavelength of light; and wherein the first axis is perpendicular to the second axis and the first and second optical densities are different.
Public/Granted literature
- US20120170017A1 ASYMMETRIC COMPLEMENTARY DIPOLE ILLUMINATOR Public/Granted day:2012-07-05
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