Invention Grant
US08686802B1 Bias voltage tuning of MEMS resonator operation point 有权
MEMS谐振器工作点的偏置电压调谐

Bias voltage tuning of MEMS resonator operation point
Abstract:
A method of configuring a device comprising a MEMS resonator includes initiating operation of the device, estimating a first parameter of the MEMS resonator based on the initiated operation, the first parameter not varying with the bias voltage, monitoring the operation of the device at a plurality of levels of the bias voltage, calculating a second parameter of the MEMS resonator based on the monitored operation, the second parameter varying with the bias voltage, determining an operational level of the bias voltage based on the estimated first parameter and the calculated second parameter, and configuring the device in accordance with the determined operational level of the bias voltage.
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