Invention Grant
- Patent Title: Bias voltage tuning of MEMS resonator operation point
- Patent Title (中): MEMS谐振器工作点的偏置电压调谐
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Application No.: US13351215Application Date: 2012-01-16
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Publication No.: US08686802B1Publication Date: 2014-04-01
- Inventor: Andrew Robert Brown , John Ryan Clark , Wan-Thai Hsu , Graham Yorke Mostyn , William Cochrane Ingle
- Applicant: Andrew Robert Brown , John Ryan Clark , Wan-Thai Hsu , Graham Yorke Mostyn , William Cochrane Ingle
- Applicant Address: US CA San Jose
- Assignee: Micrel, Incorporated
- Current Assignee: Micrel, Incorporated
- Current Assignee Address: US CA San Jose
- Agency: Lempia Summerfield & Katz LLC
- Main IPC: H03B5/30
- IPC: H03B5/30 ; G01R23/00 ; G01N27/00

Abstract:
A method of configuring a device comprising a MEMS resonator includes initiating operation of the device, estimating a first parameter of the MEMS resonator based on the initiated operation, the first parameter not varying with the bias voltage, monitoring the operation of the device at a plurality of levels of the bias voltage, calculating a second parameter of the MEMS resonator based on the monitored operation, the second parameter varying with the bias voltage, determining an operational level of the bias voltage based on the estimated first parameter and the calculated second parameter, and configuring the device in accordance with the determined operational level of the bias voltage.
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