Invention Grant
- Patent Title: DRAM cell utilizing a doubly gated vertical channel
- Patent Title (中): DRAM单元利用双门控垂直通道
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Application No.: US13412822Application Date: 2012-03-06
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Publication No.: US08686497B2Publication Date: 2014-04-01
- Inventor: WookHyun Kwon , Tsu-Jae King Liu
- Applicant: WookHyun Kwon , Tsu-Jae King Liu
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agent John P. O'Banion
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/336

Abstract:
A double-gate vertical channel transistor (DGVC) structure is described which is particularly well suited for Dynamic RAM (DRAM) memory (e.g., capacitorless DRAM) wherein the memory cell occupies a small cell area of 4F2, and provides beneficial retention properties including immunity to disturbances. The vertical transistors are arranged in an alternating gate-facing orientation, with a common source formed on a first end and separate drains on their second ends. Word lines comprise alternating front gates and back gates shared by columns of gate-facing transistors on each side of it. The DGVC cell provides enhanced scalability allowing the continued scaling of DRAM technology and can be fabricated using low-cost semiconductor materials and existing fabrication techniques. Fabrication techniques and array biasing are also described for the DGVC cell arrays.
Public/Granted literature
- US20120161229A1 DRAM CELL UTILIZING A DOUBLY GATED VERTICAL CHANNEL Public/Granted day:2012-06-28
Information query
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