Invention Grant
- Patent Title: Pore phase change material cell fabricated from recessed pillar
- Patent Title (中): 由凹柱制造的孔相变材料池
-
Application No.: US13612552Application Date: 2012-09-12
-
Publication No.: US08686391B2Publication Date: 2014-04-01
- Inventor: Alejandro G. Schrott , Chung H. Lam , Eric A. Joseph , Matthew J. Breitwisch , Roger W. Cheek
- Applicant: Alejandro G. Schrott , Chung H. Lam , Eric A. Joseph , Matthew J. Breitwisch , Roger W. Cheek
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L29/04

Abstract:
A method of manufacturing an electrode is provided that includes providing a pillar of a first phase change material atop a conductive structure of a dielectric layer; or the inverted structure; forming an insulating material atop dielectric layer and adjacent the pillar, wherein an upper surface of the first insulating material is coplanar with an upper surface of the pillar; recessing the upper surface of the pillar below the upper surface of the insulating material to provide a recessed cavity; and forming a second phase change material atop the recessed cavity and the upper surface of the insulating material, wherein the second phase change material has a greater phase resistivity than the first phase change material.
Public/Granted literature
- US20130001500A1 PORE PHASE CHANGE MATERIAL CELL FABRICATED FROM RECESSED PILLAR Public/Granted day:2013-01-03
Information query
IPC分类: