Invention Grant
- Patent Title: Drawing apparatus, and method of manufacturing article
- Patent Title (中): 绘图装置及制作方法
-
Application No.: US13606125Application Date: 2012-09-07
-
Publication No.: US08686374B2Publication Date: 2014-04-01
- Inventor: Shinji Ohishi
- Applicant: Shinji Ohishi
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell, LLP
- Priority: JP2011-198865 20110912
- Main IPC: G21K5/04
- IPC: G21K5/04

Abstract:
The present invention provides a drawing apparatus including a generation device configured to generate drawing data, a blanking device configured to blank a beam, and a blanking controller includes a first storage device, a second storage device, and a third storage device configured to respectively store the drawing data generated by the generation device, and being configured to control operations of the first storage device, the second storage device, and the third storage device so that an operation of storing the drawing data generated by the generation device in a selected one of the first storage device and the second storage device, and an operation of reading out the drawing data stored in the other of the first storage device and the second storage device, and storing the readout drawing data in the third storage device are executed in parallel.
Public/Granted literature
- US20130063708A1 DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2013-03-14
Information query