Invention Grant
- Patent Title: Laser beam machining method
- Patent Title (中): 激光束加工方法
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Application No.: US10548412Application Date: 2003-03-12
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Publication No.: US08685838B2Publication Date: 2014-04-01
- Inventor: Fumitsugu Fukuyo , Kenshi Fukumitsu , Naoki Uchiyama , Toshimitsu Wakuda , Kazuhiro Atsumi , Kenichi Muramatsu
- Applicant: Fumitsugu Fukuyo , Kenshi Fukumitsu , Naoki Uchiyama , Toshimitsu Wakuda , Kazuhiro Atsumi , Kenichi Muramatsu
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: Hamamatsu Photonics K.K.
- Current Assignee: Hamamatsu Photonics K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- International Application: PCT/JP03/02944 WO 20030312
- International Announcement: WO2004/080643 WO 20040923
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A laser processing method which can accurately cut an object to be processed along a line to cut is provided. A modified region 7 formed by multiphoton absorption forms a cutting start region 8 within an object to be processed 1 along a line to cut 5. Thereafter, the object 1 is irradiated with laser light L2 absorbable by the object 1 along the line to cut 5, so as to generate fractures 24 from the cutting start region 8 acting as a start point, whereby the object 1 can accurately be cut along the line to cut 5. Expanding an expandable film 19 having the object 1 secured thereto separates individual chips 25 from each other, which can further improve the reliability in cutting the object 1 along the line to cut 5.
Public/Granted literature
- US20070125757A1 Laser beam machining method Public/Granted day:2007-06-07
Information query
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