Invention Grant
- Patent Title: RRAM structure at STI with Si-based selector
- Patent Title (中): STI采用基于Si的选择器的RRAM结构
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Application No.: US13611817Application Date: 2012-09-12
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Publication No.: US08685799B1Publication Date: 2014-04-01
- Inventor: Shyue Seng Tan , Eng Huat Toh , Elgin Quek
- Applicant: Shyue Seng Tan , Eng Huat Toh , Elgin Quek
- Applicant Address: SG Singapore
- Assignee: GlobalFoundries Singapore Pte. Ltd.
- Current Assignee: GlobalFoundries Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Ditthavong Mori & Steiner, P.C.
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/8238

Abstract:
An RRAM at an STI region is disclosed with a vertical BJT selector. Embodiments include defining an STI region in a substrate, implanting dopants in the substrate to form a well of a first polarity around and below an STI region bottom portion, a band of a second polarity over the well on opposite sides of the STI region, and an active area of the first polarity over each band of second polarity at the surface of the substrate, forming a hardmask on the active areas, removing an STI region top portion to form a cavity, forming an RRAM liner on cavity side and bottom surfaces, forming a top electrode in the cavity, removing a portion of the hardmask to form spacers on opposite sides of the cavity, and implanting a dopant of the second polarity in a portion of each active area remote from the cavity.
Public/Granted literature
- US20140070159A1 NOVEL RRAM STRUCTURE AT STI WITH SI-BASED SELECTOR Public/Granted day:2014-03-13
Information query
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