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US08685785B2 Planar phase-change memory cell with parallel electrical paths 有权
具有并联电路径的平面相变存储单元

Planar phase-change memory cell with parallel electrical paths
Abstract:
A method of manufacturing a phase change memory cell on a substrate. The method includes: etching a first trench in the substrate; depositing a first conductor layer in the first trench; depositing a first insulator layer over the first conductor layer in the first trench; etching a second trench in the substrate at an angle to the first trench; depositing a second insulator layer in the second trench; depositing a second conductor layer over the second insulator layer in the second trench; and depositing phase change material. The deposited phase change material is in contact with the first conductor layer and the second conductor layer.
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