Invention Grant
- Patent Title: Planar phase-change memory cell with parallel electrical paths
- Patent Title (中): 具有并联电路径的平面相变存储单元
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Application No.: US13619493Application Date: 2012-09-14
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Publication No.: US08685785B2Publication Date: 2014-04-01
- Inventor: Michele M. Franceschini , John P. Karidis
- Applicant: Michele M. Franceschini , John P. Karidis
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
A method of manufacturing a phase change memory cell on a substrate. The method includes: etching a first trench in the substrate; depositing a first conductor layer in the first trench; depositing a first insulator layer over the first conductor layer in the first trench; etching a second trench in the substrate at an angle to the first trench; depositing a second insulator layer in the second trench; depositing a second conductor layer over the second insulator layer in the second trench; and depositing phase change material. The deposited phase change material is in contact with the first conductor layer and the second conductor layer.
Public/Granted literature
- US20130011993A1 PLANAR PHASE- CHANGE MEMORY CELL WITH PARALLEL ELECTRICAL PATHS Public/Granted day:2013-01-10
Information query
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