Invention Grant
- Patent Title: Thin film transistor array panel and method for manufacturing the same
- Patent Title (中): 薄膜晶体管阵列面板及其制造方法
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Application No.: US12904281Application Date: 2010-10-14
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Publication No.: US08685770B2Publication Date: 2014-04-01
- Inventor: Dae-Cheol Kim , Woong-Kwon Kim , Sang-Youn Han
- Applicant: Dae-Cheol Kim , Woong-Kwon Kim , Sang-Youn Han
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2009-0102977 20091028
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A manufacturing method of a thin film transistor array panel includes forming a gate line on a substrate and a gate insulating layer on the gate line, forming a semiconductor on the gate insulating layer, forming a first data line and a first drain electrode on the semiconductor, forming a lower passivation layer on the first data line and the first drain electrode, forming an upper passivation layer on the lower passivation layer and a metal layer on the upper passivation layer, etching the metal layer by using a photosensitive film as a mask to form a reflecting electrode and to expose the lower passivation layer, etching the exposed lower passivation layer to form a first contact hole exposing the first drain electrode, and forming a connection assistance member connecting the first drain electrode and the reflecting electrode through the first contact hole after removing the photosensitive film.
Public/Granted literature
- US20110095300A1 THIN FILM TRANSISTOR ARRAY PANEL AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2011-04-28
Information query
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