Invention Grant
- Patent Title: Mechanism for continuously varying radial position of a magnetron
- Patent Title (中): 连续变化磁控管径向位置的机理
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Application No.: US12794452Application Date: 2010-06-04
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Publication No.: US08685215B2Publication Date: 2014-04-01
- Inventor: Keith A. Miller , Anantha K. Subramani , Maurice E. Ewert , Tza-Jing Gung , Hong S. Yang , Vincent E. Burkhart
- Applicant: Keith A. Miller , Anantha K. Subramani , Maurice E. Ewert , Tza-Jing Gung , Hong S. Yang , Vincent E. Burkhart
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agent Charles S. Guenzer
- Main IPC: C23C14/35
- IPC: C23C14/35

Abstract:
A continuously variable multi-position magnetron that is rotated about a central axis in back of a sputtering target at a freely selected radius. The position is dynamically controlled from the outside, for example, through a hydraulic actuator connected between a pivoting arm supporting the magnetron and an arm fixed to the shaft, by two coaxial shafts independent controllable from the outside and supporting the magnetron through a frog-leg mechanism, or a cable connected between the pivoting arms and moved by an external slider. The magnetron can be rotated at two, three, or more discrete radii or be moved in a continuous spiral pattern.
Public/Granted literature
- US20100243440A1 Mechanism for continuously varying radial position of a magnetron Public/Granted day:2010-09-30
Information query
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