Invention Grant
- Patent Title: Removing a sheet from the surface of a melt using gas jets
- Patent Title (中): 使用气体喷射从熔体表面去除片材
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Application No.: US13037789Application Date: 2011-03-01
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Publication No.: US08685162B2Publication Date: 2014-04-01
- Inventor: Peter L. Kellerman , Gregory D. Thronson , Dawei Sun
- Applicant: Peter L. Kellerman , Gregory D. Thronson , Dawei Sun
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: C30B15/22
- IPC: C30B15/22 ; C30B9/00 ; C30B15/00 ; C30B15/06 ; C30B15/24 ; C30B15/34

Abstract:
In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.
Public/Granted literature
- US20110271899A1 REMOVING A SHEET FROM THE SURFACE OF A MELT USING GAS JETS Public/Granted day:2011-11-10
Information query
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