Invention Grant
- Patent Title: Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material
- Patent Title (中): 研磨颗粒材料以及使用磨料颗粒材料平坦化工件的方法
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Application No.: US11251633Application Date: 2005-10-14
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Publication No.: US08685123B2Publication Date: 2014-04-01
- Inventor: Jun Wang , Andrew G. Haerle
- Applicant: Jun Wang , Andrew G. Haerle
- Applicant Address: US MA Worcester
- Assignee: Saint-Gobain Ceramics & Plastics, Inc.
- Current Assignee: Saint-Gobain Ceramics & Plastics, Inc.
- Current Assignee Address: US MA Worcester
- Agency: Abel Law Group, LLP
- Agent Mike W. Crosby
- Main IPC: C09K3/14
- IPC: C09K3/14 ; C01F7/02
Abstract:
An abrasive particulate material is disclosed that includes alumina particles. The alumina particles include a transition alumina and at least 5.0 wt % of an amorphous phase. The transition alumina particles also have a density not greater than about 3.20 g/cm3.
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