Invention Grant
- Patent Title: Methods for introduction of a reactive material into a vacuum chamber
- Patent Title (中): 将反应性材料引入真空室的方法
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Application No.: US13281924Application Date: 2011-10-26
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Publication No.: US08684650B2Publication Date: 2014-04-01
- Inventor: Alan Bruce Touchberry , Terry Dean Stark
- Applicant: Alan Bruce Touchberry , Terry Dean Stark
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Fogg & Powers LLC
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01S1/00 ; H01S3/00 ; H05H3/02 ; H01S1/06
Abstract:
A vacuum chamber assembly includes a vacuum chamber containing a reactive material, an inlet fill tube fixedly attached to the vacuum chamber, and an outlet fill tube fixedly attached to the vacuum chamber. The inlet fill tube has a first vacuum tight seal and the outlet fill tube has a second vacuum tight seal.
Public/Granted literature
- US20120039689A1 METHODS FOR INTRODUCTION OF A REACTIVE MATERIAL INTO A VACUUM CHAMBER Public/Granted day:2012-02-16
Information query
IPC分类:
