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US08676538B2 Adjusting weighting of a parameter relating to fault detection based on a detected fault 有权
根据检测到的故障调整与故障检测有关的参数的权重

Adjusting weighting of a parameter relating to fault detection based on a detected fault
Abstract:
A method, apparatus and a system, for provided for performing a dynamic weighting technique for performing fault detection. The method comprises processing a workpiece and performing a fault detection analysis relating to the processing of the workpiece. The method further comprises determining a relationship of a parameter relating to the fault detection analysis to a detected fault and adjusting a weighting associated with the parameter based upon the relationship of the parameter to the detected fault.
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