Invention Grant
US08675174B2 Exposure apparatus, exposure method, and method for producing device 有权
曝光装置,曝光方法和制造装置的方法

  • Patent Title: Exposure apparatus, exposure method, and method for producing device
  • Patent Title (中): 曝光装置,曝光方法和制造装置的方法
  • Application No.: US11662729
    Application Date: 2005-09-16
  • Publication No.: US08675174B2
    Publication Date: 2014-03-18
  • Inventor: Takeyuki Mizutani
  • Applicant: Takeyuki Mizutani
  • Applicant Address: JP Tokyo
  • Assignee: Nikon Corporation
  • Current Assignee: Nikon Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Oliff PLC
  • Priority: JP2004-271635 20040917; JP2004-274990 20040922
  • International Application: PCT/JP2005/017163 WO 20050916
  • International Announcement: WO2006/030902 WO 20060323
  • Main IPC: G03B27/52
  • IPC: G03B27/52 G03B27/68 G03B27/42 G03B27/32
Exposure apparatus, exposure method, and method for producing device
Abstract:
An exposure apparatus includes a nozzle member which has at least one of a supply port for supplying a liquid and a recovery port for recovering the liquid, and a nozzle adjusting mechanism which adjusts at least one of a position and a posture of the nozzle member depending on a position or a posture of a substrate. The exposure apparatus forms an immersion area of the liquid on the substrate, and performs exposure for the substrate through the liquid in the immersion area. Accordingly, the liquid is satisfactorily retained between the projection optical system and the substrate, thereby making it possible to realize the exposure highly accurately.
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