Invention Grant
US08666532B2 Method and system for controlling a manufacturing process 有权
用于控制制造过程的方法和系统

  • Patent Title: Method and system for controlling a manufacturing process
  • Patent Title (中): 用于控制制造过程的方法和系统
  • Application No.: US12678148
    Application Date: 2008-07-22
  • Publication No.: US08666532B2
    Publication Date: 2014-03-04
  • Inventor: Rafi Amit
  • Applicant: Rafi Amit
  • Applicant Address: IL Migdal Haemek
  • Assignee: Camtek Ltd.
  • Current Assignee: Camtek Ltd.
  • Current Assignee Address: IL Migdal Haemek
  • Agent Oren Reches
  • International Application: PCT/IL2008/001011 WO 20080722
  • International Announcement: WO2009/013741 WO 20090129
  • Main IPC: G07F7/02
  • IPC: G07F7/02
Method and system for controlling a manufacturing process
Abstract:
A method, system and computer program product for controlling a manufacturing process of an electronic circuit, the method includes: calculating at least one layer misalignment between layers of an electrical circuit that are expected to be mutually aligned; wherein the layers are manufactured by at least a direct imaging device that exposes a photo-resistive material to radiation to provide a pattern; selecting, in response to the at least one layer misalignment and in response to at least one allowable misalignment threshold, a selected response out of: manufacturing at least one additional layer of the electrical circuit; and stopping the manufacturing process of the electrical circuit; and participating in executing the selected response.
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