Invention Grant
US08664951B2 MEMS gyroscope magnetic sensitivity reduction 有权
MEMS陀螺仪灵敏度降低

MEMS gyroscope magnetic sensitivity reduction
Abstract:
A tuning fork gyroscope that is insensitive to magnetic field gradients is provided. The tuning fork gyroscope includes a first electrically conducting proof mass and a second electrically conducting proof mass connected through electrically conducting suspensions to anchors attached to one or more insulating substrates, and an electrical-resistance mid-point electrically connected to opposing ends of the first electrically conducting proof mass and to opposing ends of the second electrically conducting proof mass. The tuning fork gyroscope provides an input to a sense charge amplifier. The sense charge amplifier generates an output signal indicative of a rotation of the tuning fork gyroscope. The output signal is independent of a magnetic field gradient.
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