Invention Grant
- Patent Title: Micro-electro-mechanical-system device with particles blocking function and method for making same
- Patent Title (中): 具有颗粒阻隔功能的微机电系统装置及其制造方法
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Application No.: US13009270Application Date: 2011-01-19
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Publication No.: US08664099B2Publication Date: 2014-03-04
- Inventor: Chuan Wei Wang , Sheng Ta Lee
- Applicant: Chuan Wei Wang , Sheng Ta Lee
- Applicant Address: TW Hsin-Chu
- Assignee: PixArt Imaging Incorporation, R.O.C.
- Current Assignee: PixArt Imaging Incorporation, R.O.C.
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Associates
- Main IPC: H01L21/764
- IPC: H01L21/764
Abstract:
The present invention discloses a MEMS device with particles blocking function, and a method for making the MEMS device. The MEMS device comprises: a substrate on which is formed a MEMS device region; and a particles blocking layer deposited on the substrate.
Public/Granted literature
- US20110108934A1 MICRO-ELECTRO-MECHANICAL-SYSTEM DEVICE WITH PARTICLES BLOCKING FUNCTION AND METHOD FOR MAKING SAME Public/Granted day:2011-05-12
Information query
IPC分类:
