Invention Grant
- Patent Title: Deposition method, deposition film, and method for producing organic electroluminescence display device
- Patent Title (中): 沉积方法，沉积膜和制备有机电致发光显示装置的方法
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Application No.: US13976011Application Date: 2011-12-20
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Publication No.: US08664023B2Publication Date: 2014-03-04
- Inventor: Tohru Sonoda , Shinichi Kawato , Satoshi Inoue , Satoshi Hashimoto
- Applicant: Tohru Sonoda , Shinichi Kawato , Satoshi Inoue , Satoshi Hashimoto
- Applicant Address: JP Osaka
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Osaka
- Agency: Morrison & Foerster LLP
- Priority: JP2010-291203 20101227
- International Application: PCT/JP2011/079453 WO 20111220
- International Announcement: WO2012/090777 WO 20120705
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/40 ; H01L51/40
Abstract:
A vapor deposition method of the present invention includes the steps of (i) preparing a mask unit including a shadow mask (81) and a vapor deposition source (85) fixed in position relative to each other, (ii) while moving at least one of the mask unit and the film formation substrate (200) relative to the other, depositing a vapor deposition flow, emitted from the vapor deposition source (85), onto a vapor deposition region (210), and (iii) adjusting the position of a second shutter (111) so that the second shutter (111) blocks a vapor deposition flow traveling toward the vapor deposition unnecessary region (210).
Public/Granted literature
- US20130273679A1 DEPOSITION METHOD, DEPOSITION FILM, AND METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENCE DISPLAY DEVICE Public/Granted day:2013-10-17
Information query
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