Invention Grant
- Patent Title: Fluorine-containing sulfonates having polymerizable anions and manufacturing method therefor, fluorine-containing resins, resist compositions, and pattern-forming method using same
- Patent Title (中): 含有可聚合阴离子的含氟磺酸盐及其制造方法,含氟树脂,抗蚀剂组合物和使用其的图案形成方法
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Application No.: US13121315Application Date: 2009-10-08
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Publication No.: US08663897B2Publication Date: 2014-03-04
- Inventor: Takashi Masubuchi , Kazunori Mori , Yuji Hagiwara , Satoru Narizuka , Kazuhiko Maeda
- Applicant: Takashi Masubuchi , Kazunori Mori , Yuji Hagiwara , Satoru Narizuka , Kazuhiko Maeda
- Applicant Address: JP Ube-shi
- Assignee: Central Glass Company, Limited
- Current Assignee: Central Glass Company, Limited
- Current Assignee Address: JP Ube-shi
- Agency: Crowell & Moring LLP
- Priority: JP2008-268476 20081017
- International Application: PCT/JP2009/067567 WO 20091008
- International Announcement: WO2010/044372 WO 20100422
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/30 ; C07C303/32 ; C07C309/20 ; C08F220/24 ; G03F7/039

Abstract:
According to the present invention, there is provided a polymerizable fluorine-containing sulfonic acid onium salt of the following general formula (2) and a resin obtained by polymerization thereof. It is possible by the use of this sulfonate resin of the present invention to provide a resist composition with high resolution, board depth of focus tolerance (DOF), small line edge roughness (LER) and high sensitivity. In the formula, Z represents a substituted or unsubstituted C1-C6 straight or branched alkylene group, or a divalent moiety in which substituted or unsubstituted C1-C6 straight or branched alkylene groups are bonded in series to a divalent group obtained by elimination of two hydrogen atoms from an alicyclic or aromatic hydrocarbon; R represents a hydrogen atom, a halogen atom, or a C1-C3 alkyl or fluorine-containing alkyl group; and Q+ represents a sulfonium cation or an iodonium cation.
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