Invention Grant
US08663756B2 Pellicle kit for manufacturing a pellicle 有权
用于制造防护薄膜的防护薄膜组件

Pellicle kit for manufacturing a pellicle
Abstract:
There is provided a pellicle kit for manufacturing a pellicle which comprises a pellicle frame having a jig hole in the outer wall of its frame bar and a jig having a jig pin which is adjusted to enter the respective jig hole until the front end of the jig pin is abutted against the tapered bottom face of the jig hole to thereby fix said pellicle frame.
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