Invention Grant
- Patent Title: Pellicle kit for manufacturing a pellicle
- Patent Title (中): 用于制造防护薄膜的防护薄膜组件
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Application No.: US13367719Application Date: 2012-02-07
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Publication No.: US08663756B2Publication Date: 2014-03-04
- Inventor: Yuichi Hamada , Tatsuya Sema
- Applicant: Yuichi Hamada , Tatsuya Sema
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agent Manabu Kanesaka
- Priority: JP2011-024734 20110208; JP2011-283855 20111226
- Main IPC: G03F1/14
- IPC: G03F1/14 ; G03F1/00 ; G03F1/62

Abstract:
There is provided a pellicle kit for manufacturing a pellicle which comprises a pellicle frame having a jig hole in the outer wall of its frame bar and a jig having a jig pin which is adjusted to enter the respective jig hole until the front end of the jig pin is abutted against the tapered bottom face of the jig hole to thereby fix said pellicle frame.
Public/Granted literature
- US20120202001A1 PELLICLE KIT FOR MANUFACTURING A PELLICLE Public/Granted day:2012-08-09
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