Invention Grant
- Patent Title: Apparatus for producing trichlorosilane and method for producing trichlorosilane
- Patent Title (中): 三氯硅烷的制造装置及三氯硅烷的制造方法
-
Application No.: US12929789Application Date: 2011-02-16
-
Publication No.: US08663573B2Publication Date: 2014-03-04
- Inventor: Naoya Murakami , Wataru Saiki
- Applicant: Naoya Murakami , Wataru Saiki
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Materials Corporation
- Current Assignee: Mitsubishi Materials Corporation
- Current Assignee Address: JP Tokyo
- Agency: Edwards Wildman Palmer LLP
- Priority: JP2010-032999 20100217
- Main IPC: A62D3/00
- IPC: A62D3/00 ; B01J19/00 ; C01B33/00 ; C01B33/08

Abstract:
An apparatus for producing trichlorosilane, including: a reaction vessel that has a substantially cylindrical wall body, a top plate, and a bottom plate, where a reaction product gas is produced from a raw gas supplied to the reaction vessel through a gas introducing passage provided to the lower section of the cylindrical wall body; and a plurality of heaters that are disposed inside the reaction vessel to heat the raw gas, wherein each of the heaters has a heating element that is elongated in a vertical direction and generates heat by electrification, and a mount that is fixed to the bottom plate and supports the heating element; a flange is provided to intermediate height of the heating element such that the flange is arranged upper than the gas introducing passage and is elongated in horizontal direction; and a passage of the raw gas formed between adjacent heaters is narrowed by the flange.
Public/Granted literature
- US20110200510A1 Apparatus for producing trichlorosilane and method for producing trichlorosilane Public/Granted day:2011-08-18
Information query