Invention Grant
- Patent Title: Based device risk assessment
- Patent Title (中): 基于设备风险评估
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Application No.: US13399805Application Date: 2012-02-17
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Publication No.: US08656323B2Publication Date: 2014-02-18
- Inventor: Allen Park , Youseung Jin , SungChan Cho , Barry Saville
- Applicant: Allen Park , Youseung Jin , SungChan Cho , Barry Saville
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
The process for designed based assessment includes the following steps. First, the process defines multiple patterns of interest (POIs) utilizing design data of a device and then generates a design based classification database. Further, the process receives one or more inspection results. Then, the process compares the inspection results to each of the plurality of POIs in order to identify occurrences of the POIs in the inspection results. In turn, the process determines yield impact of each POI utilizing process yield data and monitors a frequency of occurrence of each of the POIs and the criticality of the POIs in order to identify process excursions of the device. Finally, the process determines a device risk level by calculating a normalized polygon frequency for the device utilizing a frequency of occurrence for each of the critical polygons and a criticality for each of the critical polygons.
Public/Granted literature
- US20120216169A1 DESIGN BASED DEVICE RISK ASSESSMENT Public/Granted day:2012-08-23
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