Invention Grant
- Patent Title: Capacitive electromechanical transducer
- Patent Title (中): 电容式机电换能器
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Application No.: US13012699Application Date: 2011-01-24
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Publication No.: US08654614B2Publication Date: 2014-02-18
- Inventor: Atsushi Kandori , Masao Majima
- Applicant: Atsushi Kandori , Masao Majima
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2010-014044 20100126
- Main IPC: G01V1/155
- IPC: G01V1/155 ; H04R19/00 ; B06B1/06 ; H02N1/00 ; H02N1/04

Abstract:
Provided is a transducer in which electrodes in a movable region are less likely to affect the mechanical characteristics of the movable region and in which nonuniform electrical potential distribution of the surface of the electrodes in the movable region is suppressed. The transducer includes first electrodes and second electrodes opposing the first electrodes with gaps interposed between therebetween. The resistance per unit area of the first electrodes differs in a movable region relative to the second electrodes and an unmovable region relative to the second electrodes. The first electrodes in the movable region and the first electrodes in the unmovable region have different thicknesses.
Public/Granted literature
- US20110182149A1 CAPACITIVE ELECTROMECHANICAL TRANSDUCER Public/Granted day:2011-07-28
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