Invention Grant
- Patent Title: Status polling
- Patent Title (中): 状态轮询
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Application No.: US11622720Application Date: 2007-01-12
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Publication No.: US08645100B2Publication Date: 2014-02-04
- Inventor: Krishnamurthy Bhaskar , Mark J. Roulo , John S. Taylor , Lawrence R. Miller , Paul T. Russell , Jason Z. Lin , Eliezer Rosengaus , Richard M. Wallingford , Kishore Bubna
- Applicant: Krishnamurthy Bhaskar , Mark J. Roulo , John S. Taylor , Lawrence R. Miller , Paul T. Russell , Jason Z. Lin , Eliezer Rosengaus , Richard M. Wallingford , Kishore Bubna
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Agent Rick Barnes
- Main IPC: G06F11/30
- IPC: G06F11/30

Abstract:
An inspection system for detecting anomalies on a substrate. The inspection system has a sensor array for generating image data. A first high speed network is coupled to the sensor array and receives and communicates the image data. An array of process nodes is coupled to the first high speed network, and receives and processes the image data to produce anomaly reports. Each process node has an interface card coupled to the first high speed network, that receives the image data from the first high speed network and formats the image data according to a high speed interface bus protocol. The interface card sets a register indicating whether a predetermined amount of image data has been stored in a memory, and the process node reads the register to determine whether the predetermined amount of image data has been stored in the memory, and initiates image processing when the register indicates that the predetermined amount of image data has been stored in the memory.
Public/Granted literature
- US20070124095A1 Status Polling Public/Granted day:2007-05-31
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