Invention Grant
- Patent Title: Cell for light source
- Patent Title (中): 光源单元
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Application No.: US13119571Application Date: 2011-02-17
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Publication No.: US08643840B2Publication Date: 2014-02-04
- Inventor: Kenneth P. Gross , Yung-Ho Chuang , John Fielden
- Applicant: Kenneth P. Gross , Yung-Ho Chuang , John Fielden
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Agent Rick Barnes
- International Application: PCT/US2011/025198 WO 20110217
- International Announcement: WO2011/106227 WO 20110901
- Main IPC: G01N21/73
- IPC: G01N21/73 ; H01S3/225

Abstract:
A cell for a vacuum ultraviolet plasma light source, the cell having a closed sapphire tube containing at least one noble gas. Such a cell does not have a metal housing, metal-to-metal seals, or any other metal flanges or components, except for the electrodes (in some embodiments). In this manner, the cell is kept to a relatively small size, and exhibits a more uniform heating of the gas and cell than can be readily achieved with a hybridized metal/window cell design. These designs generally result in higher plasma temperatures (a brighter light source), shorter wavelength output, and lower optical noise due to fewer gas convection currents created between the hotter plasma regions and surrounding colder gases. These cells provide a greater amount of output with wavelengths in the vacuum ultraviolet range than do quartz or fused silica cells. These cells also produce continuous spectral emission well into the infrared range, making them a broadband light source.
Public/Granted literature
- US20110205529A1 Cell For Light Source Public/Granted day:2011-08-25
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