Invention Grant
US08643167B2 Semiconductor package with through silicon vias and method for making the same 有权
具有硅通孔的半导体封装及其制造方法

Semiconductor package with through silicon vias and method for making the same
Abstract:
The present invention relates to a stacked semiconductor package and a method for making the same. The method includes the steps of mounting a plurality of first dice to a wafer by conducting a reflow process; and thinning the wafer from the backside surface of the wafer, thereby reducing manufacturing time and preventing warpage.
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