Invention Grant
- Patent Title: MEMS device
- Patent Title (中): MEMS器件
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Application No.: US12293537Application Date: 2007-03-20
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Publication No.: US08643129B2Publication Date: 2014-02-04
- Inventor: Richard Ian Laming , Mark Begbie
- Applicant: Richard Ian Laming , Mark Begbie
- Applicant Address: GB Edinburgh
- Assignee: Wolfson Microelectronics plc
- Current Assignee: Wolfson Microelectronics plc
- Current Assignee Address: GB Edinburgh
- Agency: Dickstein Shapiro LLP
- Priority: GB0605576.8 20060320
- International Application: PCT/GB2007/000971 WO 20070320
- International Announcement: WO2007/107735 WO 20070927
- Main IPC: H01L29/84
- IPC: H01L29/84
Abstract:
A micro-electrical-mechanical device comprises: a transducer arrangement having at least a membrane being mounted with respect to a substrate; and electrical interface means for relating electrical signals to movement of the membrane; in which the transducer arrangement comprises stress alleviating formations which at least partially decouple the membrane from expansion or contraction of the substrate.
Public/Granted literature
- US20090278217A1 MEMS DEVICE Public/Granted day:2009-11-12
Information query
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