Invention Grant
- Patent Title: Semiconductor device with buried bit line and method for fabricating the same
- Patent Title (中): 具有掩埋位线的半导体器件及其制造方法
-
Application No.: US13554739Application Date: 2012-07-20
-
Publication No.: US08643096B2Publication Date: 2014-02-04
- Inventor: Eui-Seong Hwang
- Applicant: Eui-Seong Hwang
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2012-0024914 20120312
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119 ; H01L21/8238 ; H01L21/336

Abstract:
A semiconductor device includes trenches defined in a substrate, buried bit lines partially filling the trenches, a first source/drain layer filling remaining portions of the trenches on the buried bit lines, stack patterns having a channel layer and a second source/drain layer stacked therein and bonded to the first source/drain layer, wherein the channel layer contacts with the first source/drain layer, and word lines crossing with the buried bit lines and disposed adjacent to sidewalls of the channel layer.
Public/Granted literature
- US20130234242A1 SEMICONDUCTOR DEVICE WITH BURIED BIT LINE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-09-12
Information query
IPC分类: