Invention Grant
US08642374B2 Image sensor with reduced noise by blocking nitridation using photoresist
有权
图像传感器通过阻挡氮化使用光致抗蚀剂降低噪音
- Patent Title: Image sensor with reduced noise by blocking nitridation using photoresist
- Patent Title (中): 图像传感器通过阻挡氮化使用光致抗蚀剂降低噪音
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Application No.: US13227400Application Date: 2011-09-07
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Publication No.: US08642374B2Publication Date: 2014-02-04
- Inventor: Jeong-Ho Lyu , Sohei Manabe , Howard Rhodes
- Applicant: Jeong-Ho Lyu , Sohei Manabe , Howard Rhodes
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An image sensor is described in which the imaging pixels have reduced noise by blocking nitridation in selected areas. In one example, a method includes forming a first and second gate oxide layer over a substrate, forming a layer of photoresist over the first gate oxide layer, applying nitridation to the photoresist and the second gate oxide layer such that the first gate oxide layer is protected from the nitridation by the photoresist, and forming a polysilicon gate over the first and second gate oxide layers.
Public/Granted literature
- US20130056800A1 Image Sensor With Reduced Noise By Blocking Nitridation Using Photoresist Public/Granted day:2013-03-07
Information query
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