Invention Grant
US08642371B2 Method and system for fabricating ion-selective field-effect transistor (ISFET)
失效
用于制造离子选择场效应晶体管(ISFET)的方法和系统
- Patent Title: Method and system for fabricating ion-selective field-effect transistor (ISFET)
- Patent Title (中): 用于制造离子选择场效应晶体管(ISFET)的方法和系统
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Application No.: US13244488Application Date: 2011-09-25
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Publication No.: US08642371B2Publication Date: 2014-02-04
- Inventor: Shamsoddin Mohajerzadeh , Mehran Shahmohammdi , Nina Zehfroosh
- Applicant: Shamsoddin Mohajerzadeh , Mehran Shahmohammdi , Nina Zehfroosh
- Agency: Patent 360 LLC
- Agent Barry Choobin
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The various embodiments herein provide a method for fabricating Ion-Selective Field-Effect Transistor (ISFET) with a nano porous poly silicon layer on a gate region. The method includes providing a p-type silicon substrate and forming a silicon dioxide layer on the p-type silicon substrate. A poly silicon layer is deposited on the silicon dioxide layer. The poly silicon layer is patterned to form a gate region, a source region and a drain region in the silicon dioxide layer. A passivation layer is deposited on the gate region, source region and the drain region. The passivation layer is etched using a buffered HF to transform the poly silicon layer into a nano porous layer on the gate region by a sequential reactive ion etching process.
Public/Granted literature
- US20120258560A1 METHOD AND SYSTEM FOR FABRICATING ION-SELECTIVE FIELD-EFFECT TRANSISTOR (ISFET) Public/Granted day:2012-10-11
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