Invention Grant
- Patent Title: Method of manufacturing ridge-type semiconductor laser
- Patent Title (中): 制造脊型半导体激光器的方法
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Application No.: US13443944Application Date: 2012-04-11
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Publication No.: US08642365B2Publication Date: 2014-02-04
- Inventor: Hideki Yagi
- Applicant: Hideki Yagi
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries Ltd
- Current Assignee: Sumitomo Electric Industries Ltd
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2011-093072 20110419
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of manufacturing a ridge-type semiconductor laser includes the steps of forming a stacked semiconductor layer including an active layer and an etch stop layer on first and second surfaces of a substrate, etching the stacked semiconductor layer on the second surface, forming a semiconductor portion on the second surface, forming a ridge waveguide portion by etching the stacked semiconductor layer on the first surface to a first depth, forming semiconductor diffraction grating portions by etching the semiconductor portion to a second depth, and forming a diffraction grating section by providing resin diffraction grating portions between the semiconductor diffraction grating portions. The etching of the stacked semiconductor layer on the first surface and the etching of the semiconductor portion are performed simultaneously by using first and second mask portions.
Public/Granted literature
- US20120270347A1 METHOD OF MANUFACTURING RIDGE-TYPE SEMICONDUCTOR LASER Public/Granted day:2012-10-25
Information query
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