Invention Grant
- Patent Title: Flash memory and fabrication method and operation method for the same
- Patent Title (中): 闪存及其制作方法及操作方法相同
-
Application No.: US13321120Application Date: 2011-03-07
-
Publication No.: US08526242B2Publication Date: 2013-09-03
- Inventor: Ru Huang , Yimao Cai , Shiqiang Qin , Qianqian Huang , Poren Tang , Yu Tang , Gengyu Yang
- Applicant: Ru Huang , Yimao Cai , Shiqiang Qin , Qianqian Huang , Poren Tang , Yu Tang , Gengyu Yang
- Applicant Address: CN Beijing
- Assignee: Peking University
- Current Assignee: Peking University
- Current Assignee Address: CN Beijing
- Agency: Maschoff Brennan
- Priority: CN201010523321 20101022
- International Application: PCT/CN2011/071550 WO 20110307
- International Announcement: WO2012/051824 WO 20120426
- Main IPC: G11C11/34
- IPC: G11C11/34

Abstract:
The present invention discloses a flash memory and the fabrication method and the operation method for the same. The flash memory comprises two memory cells of vertical channels, wherein a lightly-doped N type (or P type) silicon is used as a substrate; a P+ region (or an N+ region) is provided on each of the both ends of the silicon surface, and two channel regions perpendicular to the surface are provided therebetween; an N+ region (or a P+ region) shared by two channels is provided over the channels; a tunneling oxide layer, a polysilicon floating gate, a block oxide layer and a polysilicon control gate are provided sequentially on the outer sides of each channel from inside to outside; and the polysilicon floating gate and the polysilicon control gate are isolated from the P+ region by a sidewall oxide layer. The whole device is a two-bit TFET type flash memory with vertical channels which has better compatibility with prior-art standard CMOS process. As compared with a conventional MOSFET-based flash memory, the flash memory according to the present invention possesses various advantages such as high programming efficiency, low power consumption, effective inhibition of punch-through effect, and high density, etc.
Public/Granted literature
- US20120113726A1 FLASH MEMORY AND FABRICATION METHOD AND OPERATION METHOD FOR THE SAME Public/Granted day:2012-05-10
Information query