Invention Grant
- Patent Title: Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material
- Patent Title (中): 包括低阻尼谐振器材料的悬浮膜的横向声波谐振器
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Application No.: US12790303Application Date: 2010-05-28
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Publication No.: US08525619B1Publication Date: 2013-09-03
- Inventor: Roy H. Olsson , Ihab F. El-Kady , Maryam Ziaei-Moayyed , Darren W. Branch , Mehmet F. Su , Charles M. Reinke
- Applicant: Roy H. Olsson , Ihab F. El-Kady , Maryam Ziaei-Moayyed , Darren W. Branch , Mehmet F. Su , Charles M. Reinke
- Applicant Address: US NM Albuquerque
- Assignee: Sandia Corporation
- Current Assignee: Sandia Corporation
- Current Assignee Address: US NM Albuquerque
- Agent Kevin W. Bieg
- Main IPC: H03H9/54
- IPC: H03H9/54

Abstract:
A very high-Q, low insertion loss resonator can be achieved by storing many overtone cycles of a lateral acoustic wave (i.e., Lamb wave) in a lithographically defined suspended membrane comprising a low damping resonator material, such as silicon carbide. The high-Q resonator can sets up a Fabry-Perot cavity in a low-damping resonator material using high-reflectivity acoustic end mirrors, which can comprise phononic crystals. The lateral overtone acoustic wave resonator can be electrically transduced by piezoelectric couplers. The resonator Q can be increased without increasing the impedance or insertion loss by storing many cycles or wavelengths in the high-Q resonator material, with much lower damping than the piezoelectric transducer material.
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