Invention Grant
US08525578B2 Semiconductor device having plural optical fuses and manufacturing method thereof
失效
具有多个光熔断器的半导体器件及其制造方法
- Patent Title: Semiconductor device having plural optical fuses and manufacturing method thereof
- Patent Title (中): 具有多个光熔断器的半导体器件及其制造方法
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Application No.: US13358366Application Date: 2012-01-25
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Publication No.: US08525578B2Publication Date: 2013-09-03
- Inventor: Shigeyuki Nakazawa
- Applicant: Shigeyuki Nakazawa
- Applicant Address: JP Tokyo
- Assignee: Elpida Memory, Inc.
- Current Assignee: Elpida Memory, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2011-018385 20110131
- Main IPC: H01H37/76
- IPC: H01H37/76

Abstract:
Such a device is disclosed that includes a first ladder fuse for which blowing points are arranged at a first coordinate and a second ladder fuse for which blowing points are arranged at a second coordinate. When adjustment data for adjusting circuit characteristics is within a first range, a trimming operation is performed on both the first and second ladder fuses, and when the adjustment data for adjusting the circuit characteristics is within a second range, the trimming operation is performed on the second ladder fuse without performing the trimming operation on the first ladder fuse. This configuration eliminates a necessity of irradiation on the first ladder fuse with a laser when the adjustment data is within the second range.
Public/Granted literature
- US20120194260A1 SEMICONDUCTOR DEVICE HAVING PLURAL OPTICAL FUSES AND MANUFACTURING METHOD THEREOF Public/Granted day:2012-08-02
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