Invention Grant
- Patent Title: Apparatus and method for testing a semiconductor device
- Patent Title (中): 用于测试半导体器件的装置和方法
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Application No.: US12710650Application Date: 2010-02-23
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Publication No.: US08525538B2Publication Date: 2013-09-03
- Inventor: Yanggi Kim , Chang-Hyun Cho , HoonJung Kim
- Applicant: Yanggi Kim , Chang-Hyun Cho , HoonJung Kim
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2009-0019951 20090309
- Main IPC: G01R31/00
- IPC: G01R31/00

Abstract:
Provided are an apparatus and a method of testing a semiconductor device. A horizontal maintaining unit provided inside a test head applies load to a probe card in a direction perpendicular to the probe card to hold the probe card in a horizontal state.Probe needles of the probe card are uniformly placed on a central region of pads of the semiconductor device, thereby providing an apparatus and a method of testing a semiconductor device capable of improving productivity and reducing a yield loss of a test process.
Public/Granted literature
- US20100225345A1 APPARATUS AND METHOD FOR TESTING A SEMICONDUCTOR DEVICE Public/Granted day:2010-09-09
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