Invention Grant
US08525538B2 Apparatus and method for testing a semiconductor device 有权
用于测试半导体器件的装置和方法

Apparatus and method for testing a semiconductor device
Abstract:
Provided are an apparatus and a method of testing a semiconductor device. A horizontal maintaining unit provided inside a test head applies load to a probe card in a direction perpendicular to the probe card to hold the probe card in a horizontal state.Probe needles of the probe card are uniformly placed on a central region of pads of the semiconductor device, thereby providing an apparatus and a method of testing a semiconductor device capable of improving productivity and reducing a yield loss of a test process.
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