Invention Grant
- Patent Title: Fin-type field effect transistor
- Patent Title (中): 鳍型场效应晶体管
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Application No.: US13361050Application Date: 2012-01-30
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Publication No.: US08524547B2Publication Date: 2013-09-03
- Inventor: Edward J. Nowak
- Applicant: Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb & Riley, LLC
- Agent Richard M. Kotulak, Esq.
- Main IPC: H01L29/06
- IPC: H01L29/06

Abstract:
Disclosed herein are improved fin-type field effect transistor (FinFET) structures and the associated methods of manufacturing the structures. In one embodiment FinFET drive current is optimized by configuring the FinFET asymmetrically to decrease fin resistance between the gate and the source region and to decrease capacitance between the gate and the drain region. In another embodiment device destruction at high voltages is prevented by ballasting the FinFET. Specifically, resistance is optimized in the fin between the gate and both the source and drain regions (e.g., by increasing fin length, by blocking source/drain implant from the fin, and by blocking silicide formation on the top surface of the fin) so that the FinFET is operable at a predetermined maximum voltage.
Public/Granted literature
- US20120129304A1 FIN-TYPE FIELD EFFECT TRANSISTOR Public/Granted day:2012-05-24
Information query
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