Invention Grant
- Patent Title: Method for manufacturing susceptor
- Patent Title (中): 感受器制造方法
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Application No.: US12635815Application Date: 2009-12-11
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Publication No.: US08524103B2Publication Date: 2013-09-03
- Inventor: Hideki Arai , Masayoshi Yajima , Kunihiko Suzuki
- Applicant: Hideki Arai , Masayoshi Yajima , Kunihiko Suzuki
- Applicant Address: JP Shizuoka-ken
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Shizuoka-ken
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2008-333544 20081226
- Main IPC: C23F1/00
- IPC: C23F1/00 ; C03C15/00 ; C03C25/68 ; C25F3/00

Abstract:
A method for manufacturing a susceptor includes: forming a concave pattern in a surface of a substrate to be processed; applying a SiC paste containing a SiC powder and a sintering agent to the surface of the substrate to be processed to fill the concave pattern to form a SiC coating layer; laminating a SiC substrate on the SiC coating layer; and firing the SiC coating layer to form a SiC layer having at least one convex section on the surface of the SiC substrate.
Public/Granted literature
- US20100163524A1 METHOD FOR MANUFACTURING SUSCEPTOR Public/Granted day:2010-07-01
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