Invention Grant
- Patent Title: Pressure sensor
- Patent Title (中): 压力传感器
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Application No.: US13085837Application Date: 2011-04-13
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Publication No.: US08522619B2Publication Date: 2013-09-03
- Inventor: Tomohisa Tokuda , Hirofumi Tojo , Nozomi Kida
- Applicant: Tomohisa Tokuda , Hirofumi Tojo , Nozomi Kida
- Applicant Address: JP Tokyo
- Assignee: Azbil Corporation
- Current Assignee: Azbil Corporation
- Current Assignee Address: JP Tokyo
- Agency: Troutman Sanders LLP
- Priority: JP2010-092429 20100413
- Main IPC: G01L7/02
- IPC: G01L7/02

Abstract:
A pressure sensor including a sensor chip; a differential pressure diaphragm provided in the center portion of the sensor chip; a first differential pressure gauge formed along a radial direction relative to the center of the differential pressure diaphragm, provided on a first edge of the differential pressure diaphragm; a second differential pressure gauge formed along a circumferential direction, which is perpendicular to the radial direction, provided in the vicinity of the first differential pressure gauge on the first edge of the differential pressure diaphragm; and a static pressure diaphragm disposed between an edge portion of the sensor chip and one of the edges, other than the first edge, of the differential pressure diaphragm, provided to the outside of the differential pressure diaphragm.
Public/Granted literature
- US20110247422A1 PRESSURE SENSOR Public/Granted day:2011-10-13
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