Invention Grant
- Patent Title: Acceleration sensor
- Patent Title (中): 加速度传感器
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Application No.: US12942130Application Date: 2010-11-09
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Publication No.: US08522613B2Publication Date: 2013-09-03
- Inventor: Takeharu Suzuki
- Applicant: Takeharu Suzuki
- Applicant Address: JP Tokyo
- Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Volentine & Whitt, PLLC
- Priority: JP2009-262104 20091117
- Main IPC: G01P15/12
- IPC: G01P15/12

Abstract:
There is provided an acceleration sensor including: a weight portion; plural fixed portions formed above a bottom plate around a periphery of the weight portion; a beam portion coupling the fixed portions and the weight portion, and holding the weight portion at a position separated from the bottom plate; a detection portion provided at the beam portion and detecting deformation of the beam portion; a frame portion provided so as to project out from the bottom plate and surround the fixed portions at a position separated from the fixed portions; and a lid portion of plate shape that seals an opening of the frame portion.
Public/Granted literature
- US20110113881A1 ACCELERATION SENSOR AND METHOD OF FABRICATING ACCELERATION SENSOR Public/Granted day:2011-05-19
Information query
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