Invention Grant
- Patent Title: X-ray topography apparatus
- Patent Title (中): X光地形仪器
-
Application No.: US12983359Application Date: 2011-01-03
-
Publication No.: US08503611B2Publication Date: 2013-08-06
- Inventor: Tetsuo Kikuchi
- Applicant: Tetsuo Kikuchi
- Applicant Address: JP Akishima-Shi, Tokyo
- Assignee: Rigaku Corporation
- Current Assignee: Rigaku Corporation
- Current Assignee Address: JP Akishima-Shi, Tokyo
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JP2010-000932 20100106
- Main IPC: G01N23/207
- IPC: G01N23/207

Abstract:
An x-ray topography apparatus in which x-rays diffracted from a sample which is scanned with a linear x-ray are detected by an x-ray detector to obtain a planar diffraction image. In this x-ray topography apparatus, the x-ray detector is an imaging plate shaped as a cylinder and provided with a surface area that is larger than the sample, and the imaging plate is made to undergo α-rotation about the center axis of the cylindrical shape in coordination with scanning movement of the linear x-rays. The center axis of the cylindrical shape extends in a direction at a right angle with respect to the direction of the scanning movement of the linear x-rays.
Public/Granted literature
- US20110164729A1 X-RAY TOPOGRAPHY APPARATUS Public/Granted day:2011-07-07
Information query