Invention Grant
- Patent Title: Method of determining a characteristic
- Patent Title (中): 确定特性的方法
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Application No.: US12641742Application Date: 2009-12-18
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Publication No.: US08502955B2Publication Date: 2013-08-06
- Inventor: Henricus Johannes Lambertus Megens , Johannes Anna Quaedackers , Christian Marinus Leewis , Peter Clement Paul Vanoppen
- Applicant: Henricus Johannes Lambertus Megens , Johannes Anna Quaedackers , Christian Marinus Leewis , Peter Clement Paul Vanoppen
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G03B27/42
- IPC: G03B27/42
Abstract:
A plurality of targets including a second population superimposed on a first population are formed. In the first target the second population has an asymmetry with respect to the first population. In the second target the second population has a different asymmetry with respect to the first population. Reflected radiation is detected from both the targets and used to determine different characteristics of the underlying populations.
Public/Granted literature
- US20100165312A1 Method of Determining a Characteristic Public/Granted day:2010-07-01
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