Invention Grant
- Patent Title: Method of and system for exposing a target
- Patent Title (中): 暴露目标的方法和系统
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Application No.: US12960675Application Date: 2010-12-06
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Publication No.: US08502174B2Publication Date: 2013-08-06
- Inventor: Marco Jan-Jaco Wieland
- Applicant: Marco Jan-Jaco Wieland
- Applicant Address: NL Delft
- Assignee: Mapper Lithography IP B.V.
- Current Assignee: Mapper Lithography IP B.V.
- Current Assignee Address: NL Delft
- Agency: Hoyng Monegier LLP
- Agent David P. Owen; Coraline J. Haitjema
- Main IPC: G21K5/10
- IPC: G21K5/10

Abstract:
The invention relates to a method of exposing a target by means of a plurality of beamlets. First, a plurality of beamlets is provided. The beamlets are arranged in an array. Furthermore, a target to be exposed is provided. Subsequently, relative movement in a first direction between the plurality of beamlets and the target is created. Finally, the plurality of beamlets is moved in a second direction, such that each beamlet exposes a plurality of scan lines on the target. The relative movement in the first direction and the movement of the plurality of beamlets in the second direction are such that the distance between adjacent scan lines exposed by the plurality of beamlets is smaller than a projection pitch Pproj,X in the first direction between beamlets of the plurality of beamlets in the array.
Public/Granted literature
- US20110073782A1 METHOD OF AND SYSTEM FOR EXPOSING A TARGET Public/Granted day:2011-03-31
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