Invention Grant
US08501052B2 Thin film comprising titanium oxide as main component and sintered compact sputtering target comprising titanium oxide as main component
有权
作为主要成分的以氧化钛为主要成分的薄膜,以氧化钛为主要成分的烧结微型溅射靶
- Patent Title: Thin film comprising titanium oxide as main component and sintered compact sputtering target comprising titanium oxide as main component
- Patent Title (中): 作为主要成分的以氧化钛为主要成分的薄膜,以氧化钛为主要成分的烧结微型溅射靶
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Application No.: US13145641Application Date: 2010-01-29
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Publication No.: US08501052B2Publication Date: 2013-08-06
- Inventor: Hideo Takami , Masataka Yahagi
- Applicant: Hideo Takami , Masataka Yahagi
- Applicant Address: JP Tokyo
- Assignee: JX Nippon Mining & Metals Corporatoin
- Current Assignee: JX Nippon Mining & Metals Corporatoin
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson LLP
- Priority: JP2009-025064 20090205; JP2009-089653 20090402
- International Application: PCT/JP2010/051232 WO 20100129
- International Announcement: WO2010/090137 WO 20100812
- Main IPC: F21V9/00
- IPC: F21V9/00 ; G02B5/02 ; G02C7/10 ; G02F1/361 ; G03B11/00 ; C23C14/00 ; C23C14/32

Abstract:
A thin film comprising titanium oxide as its main component, wherein the thin film includes titanium, oxygen and copper, content of Ti is 29.0 at % or higher and 34.0 at % or less and content of Cu is 0.003 at % or higher and 7.7 at % or less with remainder being oxygen and unavoidable impurities, and ratio of oxygen component to metal components, O/(2Ti+0.5Cu), is 0.96 or higher. This invention aims to obtain a thin film comprising titanium oxide as its main component with a high refractive index and low extinction coefficient and a sintered compact sputtering target comprising titanium oxide as its main component which is suitable for producing the foregoing thin film, to obtain a thin film with superior transmittance and low reflectance and which is effective as an interference film or protective film of an optical information recording medium, and to obtain a thin film that can be applied to a glass substrate; that is, a thin film that can be used as a heat ray reflective film, antireflection film, and interference filter.
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