Invention Grant
- Patent Title: Method for making a planar membrane
- Patent Title (中): 制造平面膜的方法
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Application No.: US13377319Application Date: 2010-06-17
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Publication No.: US08501026B2Publication Date: 2013-08-06
- Inventor: Christophe Constancias , Bernard Dalzotto , Frank Fournel , Philippe Michallon , Hubert Moriceau , Valerie Pouteau
- Applicant: Christophe Constancias , Bernard Dalzotto , Frank Fournel , Philippe Michallon , Hubert Moriceau , Valerie Pouteau
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0954115 20090618
- International Application: PCT/EP2010/058584 WO 20100617
- International Announcement: WO2010/146138 WO 20101223
- Main IPC: B44C1/22
- IPC: B44C1/22 ; H01L21/31 ; G01N3/08
Abstract:
A method for determining a minimum tension compensation stress which will have a membrane of a thickness of less than or equal to one micrometer, secured to a frame, having, in the absence of any external stress, a desired deflection. The membrane can be made as planar as possible in absence of any external stress, and its thickness can be less than or equal to one micrometer.
Public/Granted literature
- US20120100719A1 METHOD FOR MAKING A PLANAR MEMBRANE Public/Granted day:2012-04-26
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