Invention Grant
- Patent Title: Method for forming a mirror MEMS device
- Patent Title (中): 形成镜面MEMS器件的方法
-
Application No.: US13323466Application Date: 2011-12-12
-
Publication No.: US08501023B2Publication Date: 2013-08-06
- Inventor: Brett A. Mangrum
- Applicant: Brett A. Mangrum
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Warren L. Franz; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: B29D11/00
- IPC: B29D11/00

Abstract:
An apparatus for use with a digital micromirror device includes a hinge layer that is disposed outwardly from a substrate. The hinge layer including a hinge that is capable of at least partially supporting a micromirror that is disposed outwardly from the hinge. In one particular embodiment, the hinge and the substrate are separated by a first air gap. The device also including a first hinge support that is disposed outwardly from the substrate and inwardly from at least a portion of the hinge layer. The first hinge support being capable of transmitting a voltage to the hinge. At least a portion of the hinge support coupled to at least the portion of the hinge layer. In one particular embodiment, the first hinge support is formed in a process step that is different than a process step that forms the hinge layer.
Public/Granted literature
- US20120285925A1 Method for forming a mirror mems device Public/Granted day:2012-11-15
Information query