Invention Grant
- Patent Title: Photoresist-free metal deposition
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Application No.: US11827800Application Date: 2007-07-13
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Publication No.: US08500985B2Publication Date: 2013-08-06
- Inventor: Steven T. Mayer , John Stephen Drewery , Eric G. Webb
- Applicant: Steven T. Mayer , John Stephen Drewery , Eric G. Webb
- Applicant Address: US CA San Jose
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: C25D5/34
- IPC: C25D5/34 ; C25D5/00 ; C25D5/02 ; B05D5/00

Abstract:
Selectively accelerated or selectively inhibited metal deposition is performed to form metal structures of an electronic device. A desired pattern of an accelerator or of an inhibitor is applied to the substrate; for example, by stamping the substrate with a patterned stamp or spraying a solution using an inkjet printer. In other embodiments, a global layer of accelerator or inhibitor is applied to a substrate and selectively modified in a desired pattern. Thereafter, selective metal deposition is performed.
Public/Granted literature
- US20090280243A1 Photoresist-free metal deposition Public/Granted day:2009-11-12
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