Invention Grant
- Patent Title: Cylindrical magnetron
- Patent Title (中): 圆柱形磁控管
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Application No.: US12420935Application Date: 2009-04-09
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Publication No.: US08500972B2Publication Date: 2013-08-06
- Inventor: Mark A. Bernick
- Applicant: Mark A. Bernick
- Applicant Address: US PA Duquesne
- Assignee: Angstrom Sciences, Inc.
- Current Assignee: Angstrom Sciences, Inc.
- Current Assignee Address: US PA Duquesne
- Agency: The Webb Law Firm
- Main IPC: C23C14/3414
- IPC: C23C14/3414 ; C23C14/3407 ; Y02E30/40

Abstract:
A rotatable cylindrical magnetron sputtering device that includes a cathode body defining a magnet receiving chamber and a cylindrical target assembly surrounding the cathode body, wherein the cylindrical target assembly is rotatable around the cathode body. The cylindrical target assembly includes a hollow mandrel and a target portion mounted around and spaced away from the hollow mandrel portion so as to create a space gap between the hollow mandrel and the target portion, wherein the space gap may be greater than 0.002 inch and less than 0.020 inch.
Public/Granted literature
- US20090260983A1 Cylindrical Magnetron Public/Granted day:2009-10-22
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