Invention Grant
- Patent Title: Method of fabricating bubble-type micro-pump
- Patent Title (中): 制造气泡式微型泵的方法
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Application No.: US12610736Application Date: 2009-11-02
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Publication No.: US08500964B2Publication Date: 2013-08-06
- Inventor: Chen Peng
- Applicant: Chen Peng
- Applicant Address: TW Taoyuan County
- Assignee: Benq Materials Corp.
- Current Assignee: Benq Materials Corp.
- Current Assignee Address: TW Taoyuan County
- Agency: McClure, Qualey & Rodack, LLP
- Priority: TW97149831A 20081219
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/32 ; F17D1/16 ; F17D1/18 ; F15C1/04

Abstract:
A manufacturing method of a bubble-type micro-pump is provided. At least a bubble-generating unit is provided on the bubble-generating section. Because of the varied surface energies on the top of the bubble-generating section, the varied backfilling velocities of the fluid of the front end and the rear end cause fluid moving when a bubble vanishes. The top surface of the bubble-generating section is subjected to a particular surface treatment to form a surface energy gradient. Examples of surface treatment include sputtering a thin film with varied densities or thickness, radiating one or multi-layer thin films by a laser beam, etc.
Public/Granted literature
- US20100155230A1 Method of Fabricating Bubble-Type Micro-Pump Public/Granted day:2010-06-24
Information query
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